I-Industrial/Electronic grade TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Imininingwane yomkhiqizo:
Igama Lomkhiqizo: TMAH 25% ; I-Tetramethylammonium Hydroxide
Inombolo ye-CAS: 75-59-2
I-Molecular Formula: C4H13NO
Ukubukeka: uketshezi olungenambala
eyangempela njengekristalu engenambala (equkethe amanzi ekristalu amathathu/amahlanu), kulula ukumunca umswakama, enephunga elithile le-ammonia kanye nesisekelo esiqinile; ukumunca i-carbon dioxide emoyeni, yakhe i-carbonate, i-organic alkali, nokubola okunamandla. Umkhiqizo unezinhlobo ezimbili zokucaciswa: isixazululo samanzi nesisombululo se-methanol.
I-Tetramethylammonium hydroxide (TMAH noma i-TMAOH) iwusawoti we-quaternary ammonium onefomula ye-molecular [(CH3)4N]+[OH]-, futhi iyilungu elilula kakhulu lekilasi lezinhlanganisela ze-organic quaternary ammonium. Enye yezindlela ezisetshenziswa ngayo ezimbonini iwukuba i-anisotropic etching ye-silicon. Iphinde isetshenziswe njenge-solvent eyisisekelo ekuthuthukisweni kwe-photoresist ene-acidic kunqubo ye-photolithography. Njengoba kuyi-catalyst yokudlulisa isigaba, iphumelela kakhulu ekukhumuleni i-photoresist. Ibuye isetshenziswe njenge-surfactant ekuhlanganiseni kwe-ferrofluid, ukuvimbela i-agglomeration.
I-1) Esicini sokuhlaziya, i-tetramethylammonium Hydroxide ingasetshenziswa njenge-reagent ye-polarographic.
2) Mayelana nokuhlanzwa komkhiqizo, yayisetshenziswa njenge-alkali engenamlotha ukuze kudidiyelwe into ethile eyinsimbi.
3) embonini ye-elekthronikhi, ikakhulukazi njengomthuthukisi we-resistant omuhle, i-silicon wafer wet etchant nesisombululo esihlanzekile kakhulu senqubo ye-CMP.
4) ekwakhiweni kwamasekethe ahlanganisiwe, izibonisi zekristalu ewuketshezi, amabhodi esekethe aphrintiwe, ama-capacitor, izinzwa, nezinye izinto eziningi zikagesi.
| Ulwazi Lokuthumela | Izitsha |
| 200L isigubhu esihlanzekile | |
| Ezinye iziqukathi ezitholakalayo uma uzicelile. | |
| Ukuhlelwa Kokuthunyelwa | |
| Igama elifanele lokuthumela: i-tetramethylammonium hydroxide | |
| Ukuhlukaniswa kwezingozi: 8 | |
| Inombolo kamazisi: UN1835, PGII |
| Ukuphepha Nokuphatha | Ukuze uthole imininingwane ethile yokuphepha kanye nokusingatha sicela ubheke ku |
| I-Material Safety Data Sheet etholakala uma uyicela. |
| Into | Inkomba |
| Ukubukeka | Uketshezi olungenambala |
| Isivivinyo | 25.00±0.50% |
| I-Hazen | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (Lokho) | ≤ 5ppb |
| (ukuthi) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (Lokho) | ≤ 10ppb |
| (Cr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (Co) | ≤ 5ppb |
| (Ngena) | ≤ 5ppb |
| (Nge) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (Okwe) | ≤ 5ppb |
| (Nge) | ≤ 5ppb |
| (Cd) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| izinhlayiya (≥0.5μm) | ≤100ea/ml |
200kg noma 25kg/isigubhu
a, Igcinwe endaweni epholile, eyomile futhi engenisa umoya
b, Kude nomlilo nokushisa
c, Phatha ngokucophelela futhi akukho ukuphuka
