Ipele ile-iṣẹ/itanna TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Awọn alaye ọja:
Orukọ Ọja: TMAH 25%; Tetramethylammonium Hydroxide
CAS No.: 75-59-2
Fọọmu Molecular: C4H13NO
Irisi: omi ti ko ni awọ
atilẹba rẹ bi okuta gara ti ko ni awọ (ti o ni awọn omi garami mẹta/marun), rọrun lati fa ọrinrin, pẹlu õrùn amonia kan ati ipilẹ to lagbara; gbigba erogba oloro ni air, lara kaboneti, Organic alkali, pẹlu lagbara ibaje. Ọja naa ni iru awọn pato meji: ojutu omi ati ojutu kẹmika.
Tetramethylammonium hydroxide (TMAH tabi TMAOH) jẹ iyọ ammonium quaternary pẹlu agbekalẹ molikula [(CH3) 4N]+[OH] -, ati pe o jẹ ọmọ ẹgbẹ ti o rọrun julọ ti kilasi ti awọn agbo ogun ammonium quaternary Organic. Ọkan ninu awọn lilo ile-iṣẹ rẹ jẹ fun etching anisotropic ti ohun alumọni. O tun lo bi epo ipilẹ ni idagbasoke ti photoresist ekikan ninu ilana fọtolithography. Niwọn bi o ti jẹ ayase gbigbe alakoso, o munadoko pupọ ni yiyọ photoresisist. O tun ti wa ni lo bi awọn kan surfactant ni kolaginni ti ferrofluid, lati se agglomeration.
1) Ni abala ti itupalẹ, tetramethylammonium Hydroxide le ṣee lo bi reagent polarographic.
2) Ni awọn ofin ti ìwẹnumọ ọja, o ti lo bi eeru free alkali lati erofo diẹ ninu awọn ti fadaka ano.
3) ni ile-iṣẹ itanna, ni pataki bi olupilẹṣẹ olutaja rere, ohun alumọni wafer tutu etchant ati ojutu mimọ Super fun ilana CMP.
4) ni iṣelọpọ ti awọn iyika iṣọpọ, awọn ifihan gara omi, awọn igbimọ Circuit ti a tẹjade, awọn agbara, awọn sensọ, ati ọpọlọpọ awọn paati itanna miiran.
Gbigbe Alaye | Awọn apoti |
200L mọ ilu | |
Miiran awọn apoti wa lori ìbéèrè. | |
Sowo Classification | |
Orukọ gbigbe to tọ: tetramethylammonium hydroxide | |
Iyasọtọ eewu: 8 | |
Nọmba idanimọ: UN1835, PGII |
Ailewu ati mimu | Fun kan pato ailewu ati mimu alaye jọwọ tọkasi awọn |
Iwe Data Aabo Ohun elo ti o wa lori ibeere. |
Nkan | Atọka |
Ifarahan | Omi ti ko ni awọ |
Ayẹwo | 25.00± 0.50% |
Hazen | ≤ 50# |
(CO32-) | ≤40ppm |
(Cl) | 0.1ppm |
(CH3OH) | ≤40ppm |
(Iyẹn) | ≤5ppb |
(pe) | ≤ 10ppb |
(Mg) | ≤5ppb |
(Al) | ≤ 10ppb |
(K) | ≤ 10ppb |
(Iyẹn) | ≤ 10ppb |
(Kr) | ≤5ppb |
(Mn) | ≤5ppb |
(Fe) | ≤5ppb |
(Co) | ≤5ppb |
(Ni) | ≤5ppb |
(Pẹlu) | ≤5ppb |
(Zn) | ≤5ppb |
(Fun) | ≤5ppb |
(Ni) | ≤5ppb |
(Cd) | ≤5ppb |
(Pb) | ≤5ppb |
patikulu (≥0.5μm) | ≤100ea/ml |
200kg tabi 25kg / ilu
a, Ti o ti fipamọ ni itura, gbẹ ati fentilesonu ibi
b, Kuro lati ina ati ooru
c, Mu pẹlu abojuto ko si si fifọ