Vasega Alamanuia/Eletonika TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Fa'amatalaga o oloa:
Igoa Oloa: TMAH 25% ; Tetramethylammonium Hydroxide
Numera CAS: 75-59-2
Fuafua mole: C4H13NO
Fa'aaliga: vai e leai ni lanu
o lona amataga e pei o se tioata e leai ni lanu (e iai vai tioata e tolu/lima), e faigofie ona mitiia le susu, faatasi ai ma le manogi ammonia ma le malosi malosi; mitiia o le carbon dioxide i le ea, fausia carbonate, organic alkali, ma le corrosivity malosi. O le oloa e lua ituaiga o faʻamatalaga: vaifofo ma vaifofo methanol.
Tetramethylammonium hydroxide (TMAH poʻo TMAOH) o se masima ammonium quaternary ma le fua mole mole [(CH3)4N] + [OH]-, ma o le tagata sili ona faigofie o le vasega o mea faʻapipiʻi ammonium quaternary organic. O se tasi o ana fa'aoga fa'apisinisi e mo le etching anisotropic o le silikoni. E faʻaaogaina foʻi e avea o se soli faʻavae i le atinaʻeina o photoresist acidic i le faagasologa o le photolithography. Talu ai o se vaega fa'aliliuina fa'aliliuga, e matua aoga tele i le tapeina photoresist. E faʻaaogaina foi e avea o se mea faʻafefe i le faʻapipiʻiina o le ferrofluid, e puipuia ai le agglomeration.
1) I le itu o le auʻiliʻiliga, e mafai ona faʻaaogaina le tetramethylammonium Hydroxide e avea ma reagent polarographic.
2) I le tulaga o le faamamaina o oloa, sa faaaogaina e pei o le efuefu saoloto alkali e palapala nisi elemene metallic.
3) i alamanuia faaeletonika, aemaise lava le lelei tetee developer, silicon wafer susu etchant ma sili mama fofo mo CMP faagasologa.
4) i le gaosiga o fesoʻotaʻiga tuʻufaʻatasia, faʻaaliga tioata vai, laupapa faʻasalalau lolomi, capacitors, sensors, ma le tele o isi mea faʻaeletoroni.
| Fa'amatalaga Va'a | Koneteina |
| 200L mama mama | |
| O isi koneteina e maua pe a talosagaina. | |
| Fa'avasegaga o Va'a | |
| Igoa felauaiga talafeagai: tetramethylammonium hydroxide | |
| Fa'avasegaga o lamatiaga: 8 | |
| Numera fa'ailoa: UN1835, PGII |
| Saogalemu ma le Taulimaina | Mo fa'amatalaga fa'apitoa mo le saogalemu ma le tagofiaina fa'amolemole tagai ile |
| Pepa Fa'amaumauga o le Saogalemu o Mea e maua pe a talosagaina. |
| Aitema | Fa'asinomaga |
| Fa'aaliga | Suavai e le lanu |
| Su'ega | 25.00±0.50% |
| Haseni | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (lea) | ≤ 5ppb |
| (lea) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (lea) | ≤ 10ppb |
| (Cr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (Co) | ≤ 5ppb |
| (I totonu) | ≤ 5ppb |
| (Ma) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (Mo) | ≤ 5ppb |
| (I) | ≤ 5ppb |
| (Cd) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| fasimea (≥0.5μm) | ≤100ea/ml |
200kg po'o le 25kg/pa'u
a, Teu i totonu o se nofoaga malulu, mago ma ea
e, O ese mai le afi ma le vevela
i, Taulima ma le faaeteete ma ia leai se gau
