Papa Hana Hana/Elekiko TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
TMAH 25% Tetramethylammonium Hydroxide cas 75-59-2
Nā kikoʻī huahana:
Inoa Huahana: TMAH 25% ; Tetramethylammonium Hydroxide
Helu CAS: 75-59-2
ʻAno Molekala: C4H13NO
ʻAno: wai kala ʻole
ʻO kona kumu me he aniani kala ʻole (he ʻekolu/ʻelima mau wai aniani), maʻalahi ke komo i ka makū, me kekahi ʻala amonia a me ke kumu ikaika; hoʻopaʻa ʻana i ka carbon dioxide i ka ea, hana i ka carbonate, organik alkali, me ka corrosivity ikaika. ʻElua ʻano kikoʻī o ka huahana: ka wai a me ka methanol solution.
ʻO Tetramethylammonium hydroxide (TMAH a i ʻole TMAOH) he paʻakai ammonium quaternary me ke ʻano molekole [(CH3)4N]+[OH]-, a ʻo ia ka lālā maʻalahi loa o ka papa o nā pūhui ammonium quaternary organik. ʻO kekahi o kāna hoʻohana ʻoihana no ka etching anisotropic o ke silika. Hoʻohana ʻia ʻo ia ma ke ʻano he mea hoʻoheheʻe kumu i ka hoʻomohala ʻana o ka photoresist acidic i ke kaʻina photolithography. No ka mea he mea hoʻololi hoʻololi ia, ʻoi aku ka maikaʻi o ka wehe ʻana i ka photoresist. Hoʻohana ʻia ʻo ia ma ke ʻano he surfactant i ka synthesis o ferrofluid, e pale i ka agglomeration.
1) Ma ke ʻano o ka nānā ʻana, hiki ke hoʻohana ʻia ka tetramethylammonium Hydroxide ma ke ʻano he polarographic reagent.
2) Ma ke ʻano o ka hoʻomaʻemaʻe ʻana i ka huahana, ua hoʻohana ʻia ʻo ia e like me ka alkali lehu ʻole e hoʻomoe i kekahi mea metala.
3) i loko o ka ʻoihana uila, ʻoi aku ka maikaʻi e like me ka mea hoʻomohala kūpaʻa maikaʻi, silicon wafer wet etchant a me ka hopena maʻemaʻe loa no ke kaʻina CMP.
4) i ka hana ʻana i nā kaapuni i hoʻohui ʻia, nā hōʻike aniani wai, nā papa kaapuni i paʻi ʻia, nā capacitors, nā mea ʻike, a me nā mea uila ʻē aʻe he nui.
| ʻIkepili Hoʻouna | Nā pahu pahu |
| 200L pahu maʻemaʻe | |
| Loaʻa nā pahu ʻē aʻe ma ke noi. | |
| Hoʻokaʻawale moku | |
| Ka inoa hoʻouna kūpono: tetramethylammonium hydroxide | |
| Hoʻohui pōʻino: 8 | |
| Helu ʻike: UN1835, PGII |
| Ka palekana a me ka lawelawe ʻana | No ka 'ike palekana a me ka lawelawe 'ana, e nānā i ka |
| Pepa ʻIkepili Palekana Mea i loaʻa ma ke noi. |
| 'ikamu | Papa kuhikuhi |
| Ka nana aku | wai kala ʻole |
| Hoʻāʻo | 25.00±0.50% |
| Hazen | ≤ 50# |
| (CO32-) | ≤ 40ppm |
| (Cl) | ≤ 0.1ppm |
| (CH3OH) | ≤ 40ppm |
| (Kela) | ≤ 5ppb |
| (kēlā) | ≤ 10ppb |
| (Mg) | ≤ 5ppb |
| (Al) | ≤ 10ppb |
| (K) | ≤ 10ppb |
| (Kela) | ≤ 10ppb |
| (Cr) | ≤ 5ppb |
| (Mn) | ≤ 5ppb |
| (Fe) | ≤ 5ppb |
| (Co) | ≤ 5ppb |
| (Ma) | ≤ 5ppb |
| (Me) | ≤ 5ppb |
| (Zn) | ≤ 5ppb |
| (No) | ≤ 5ppb |
| (Ma) | ≤ 5ppb |
| (Cd) | ≤ 5ppb |
| (Pb) | ≤ 5ppb |
| ʻāpana (≥0.5μm) | ≤100ea/ml |
200kg a i ʻole 25kg / pahu
a, Mālama ʻia ma kahi anuanu, maloʻo a me ka ea
b, Kaawale i ke ahi a me ka wela
c, E lawelawe me ka malama a me ka haki ole
